光学镜片 光学平台 干燥柜 显微镜 CVI
Total-reflection flat mirrors for use in scanning at an deflection angle within a certain value.
When a dielectric-multilayer-film (dielectric multilayer) mirror with a narrower reflection zone and a larger angle dependency is used, it is not possible to have a larger deflection angle, since the incidence angle varies for flat mirrors for scanners. In addition, the mirror must be made thinner to minimize substrate inertia.
Be sure to wear laser safety goggles when checking optical path and adjusting optical axis.
The surface flatness is the reflected wavefront distortion of the surface before coating.