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准分子激光器

193nm准分子激光器

193nm准分子激光器
  • 型号EX5
  • 品牌

详细描述

Applications

 

Ionization source
Compact OEM systems
Micromachining
Refractive Surgery

 

A genuine full function, low cost MINI excimer laser in an ultra compact 48 X 26 X 26cm, 15kg, air cooled package with up to 8.0W at 248nm and 4.0W at 193nm and up to 500Hz repetition rate. The laser design features include an internal Faraday cage for ultra low electrical noise and a total metal/ceramic laser chamber.
NEW TYPE II SUPERCHAMBER      
The EX5 is now available in 250Hz, 500Hz and 1000Hz versions. The TYPE III SUPERCHAMBER produces higher average power output with longer gas lifetime.  F2 operation in the VUV is also standard with up to 1W output power. A new broadband optics set allows operation from 157nm to 351nm with full specifications simply by changing the gas. A 500Hz Industrial version is also available.
Key Benefits

 

Long sytem lifetime for Industrial installations
The most powerful mini excimer available anywhere
Mini excimer in a single  package
Internal vacuum pump and halogen filter
Computer controlled
Ultra Low trigger jitter
High reliability state of the art, long life laser chamber
Excellent pulse to pulse stability
Very long shelf life
250Hz, 500Hz  and a NEW 1000Hz version
The latest in materials science TYPE III SUPERCHAMBER
High duty cycle Industrial version
25mJ TEM00 C02 TEA Version

 

EX5 Specifications
PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 1.5/2.0* 12 20 8 6
Peak Power MW 0.25 1.75 2.5 1.0 0.75
Average Power @ 250Hz 0.3/0.4 2.5 4.0 1.4 1.3
Average Power @ 500Hz 0.5 5.0 8.0 2.5 2.4
Average Power 1000HZ 1.0 8 12 5 4
Dynamic gas lifetime Pulses to 50% energy 10E6 12E6 18E6 20E6 15E6
Shelf life to 50% energy 10 days 20 days 30 days >2 Months 30 Days
Pulse Length nS 8
Stability <2% Standard Deviation
Tube Service >5 Billion Pulses
Beam Size, mm 3X 6
Divergence, mRad full angle 1 X 2
Cooling Air standard/Optinal Water
Timing Jitter 2nS Standard Deviation
Weight 15kg 250/500Hz,  25kg 1000Hz
 
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