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准分子激光器

半导体行业应用准分子激光器

半导体行业应用准分子激光器
  • 型号SE
  • 品牌

详细描述

Lasers for Semiconductor Applications    (SE-Version)  

THE ULTIMATE IN EXCIMER LASER TECHNOLOGY

Semiconductor processing, mask inspection, microlithography and metrology lasers are available which meet CE mark and SEMI S2 standards. All semiconductor excimer lasers use the latest total metal/ceramic technology for maximum laser lifetime with minimal service. SE-version excimer lasers feature clean room packaging, longer chamber lifetimes and longer gas lifetimes than standard excimer lasers.

SE-Version Features

 

bullet 10 Billion pulse system lifetime
bullet Guaranteed <1% stability
bullet 200 Million pulses on a single ArF 193nm gas fill
bullet Hard anodize clean room package
bullet Meets SEMI S2 standards

 

The EX10SE Semiconductor Excimer Laser

SE Versions are available for EX10, EX50, EX100 and EX100H products.

 

EX10SE specifications

 
PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 3 20 35 15 15
Energy Control Range mJ 1-3 5-20 10-35 7-15 7-15
Max. Stabilized Energy 200Hz 2.5 15 30 15 12
Average power Max. W 300/600 0.6/1.2 4/7 6/12 3/6 3/6
Stability standard deviation < 1% at max. repetition rate
Repetition Rate, Hz 300/600/1000
Dynamic gas lifetime  200E6 200E6 500E6 100E6 300E6
Static Gas Life to 50% energy 15 days 60 days 90 days >1 Year 90 days
Pulse Length, ns 12-15
Beam Size, mm 5 X 3 8 X 3
Divergence, mRad full angle 1 X 2 
Cooling Air
Optics Service 500E6 300E6 1000E6 100E6 300E6

 

 

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